JPS6311729Y2 - - Google Patents
Info
- Publication number
- JPS6311729Y2 JPS6311729Y2 JP1983162444U JP16244483U JPS6311729Y2 JP S6311729 Y2 JPS6311729 Y2 JP S6311729Y2 JP 1983162444 U JP1983162444 U JP 1983162444U JP 16244483 U JP16244483 U JP 16244483U JP S6311729 Y2 JPS6311729 Y2 JP S6311729Y2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- case
- groove
- mask blank
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Packaging For Recording Disks (AREA)
- Packaging Frangible Articles (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983162444U JPS6071136U (ja) | 1983-10-19 | 1983-10-19 | マスクブランク収納ケ−ス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983162444U JPS6071136U (ja) | 1983-10-19 | 1983-10-19 | マスクブランク収納ケ−ス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6071136U JPS6071136U (ja) | 1985-05-20 |
| JPS6311729Y2 true JPS6311729Y2 (en]) | 1988-04-05 |
Family
ID=30356718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983162444U Granted JPS6071136U (ja) | 1983-10-19 | 1983-10-19 | マスクブランク収納ケ−ス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6071136U (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3057684B2 (ja) * | 1989-05-09 | 2000-07-04 | 淀川化成株式会社 | ガラス基板用カセット |
| JP4679759B2 (ja) * | 2001-06-08 | 2011-04-27 | 梅田真空包装株式会社 | 容器構造 |
-
1983
- 1983-10-19 JP JP1983162444U patent/JPS6071136U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6071136U (ja) | 1985-05-20 |
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